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Keywords: PhD in Metal-assisted Chemical Etching for X-ray Gratings Microfabrication,
Location: Zurich
Page: 1
PhD in Metal-assisted Chemical Etching for X-ray Gratings Microfabrication
methods Synthesis and process optimization of high aspect ratio microstructured gratings by metalassistedchemicaletching... a novel catalyst approach for defect control in metal-assistedchemicaletching (MacEtch) of silicon. The ultimate goal...